Table 1 The parameter table of simulation

From: Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

Symbol

Value

Symbol

Value

\(N\)

2

\(E\)

150 [Gpa]

\({L}_{c}\)

1.5 [μm]

\(\frac{{dC}}{{dZ}}\)

26.5 [pF/m]

\(l\)

43.75 [μm]

  
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