Fig. 2: Schematic and simulation results of mechanical mode-matching design. | Microsystems & Nanoengineering

Fig. 2: Schematic and simulation results of mechanical mode-matching design.

From: Bridging piezoelectric and electrostatic effects: a novel piezo-MEMS pitch/roll gyroscope with sub 10°/h bias instability

Fig. 2

a Main structure schematic of the presented gyroscope b Structure of lump mass c Eigen frequencies variation in the IP mode and OOP mode of the conventional annulus (without lump mass) d After applying lumped masses, the frequencies of the IP and OOP modes with varying annulus

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