Table 1 The Key parameters of gyroscope
Parameter | Value |
|---|---|
AlN thickness | 1[μm] |
Silicon device layer thickness | 25[μm] |
Annulus diameter | 5000[μm] |
Annulus width | 90[μm] |
Mass span | 30[deg] |
Mass width | 320[μm] |
Electrostatic gap | 4[μm] |
Tuning electrode angle | 58[deg] |
Support beam width | 20[μm] |
