Fig. 4: Experimental results of fabricated LWRs. | Microsystems & Nanoengineering

Fig. 4: Experimental results of fabricated LWRs.

From: 6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes

Fig. 4

a The SEM image of LWRs with traditional IDTs. b The SEM image of LWRs with checker-shaped IDTs. c Measured admittance and conductance curves of LWRs with traditional IDTs and a P of 20 \({\rm{\mu }}{\rm{m}}\). d Measured admittance and conductance curves of LWRs with checker-shaped IDTs and a P of 20 \({\rm{\mu }}{\rm{m}}\). e Measured admittance and conductance curves of LWRs with traditional IDTs and a P of 10 \({\rm{\mu }}{\rm{m}}\). f Measured admittance and conductance curves of LWRs with checker-shaped IDTs and a P of 10 \({\rm{\mu }}{\rm{m}}\)

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