Fig. 7: Experimental results of fabricated A1-mode LWR filters. | Microsystems & Nanoengineering

Fig. 7: Experimental results of fabricated A1-mode LWR filters.

From: 6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes

Fig. 7

a SEM images of the fabricated LWR filters. b A zoom-in view of region A in the filter with traditional IDTs. c A zoom-in view of region A in the filter with checker-shaped IDTs. d The measured S21 responses of the LWR filter with traditional IDTs. e The measured S21 responses of the LWR filter with checker-shaped IDTs

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