Table 1 Comparison with different research on performances of A1-Mode LWRS

From: 6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes

Ref.

Piezoelectric Material

fs (GHz)

\({k}_{{eff}}^{2}\)

Q

FOM

14

Z-cut LN

5.25

26.6%

112

29.8

35

Z-cut LN

5.44

26.3

70

18.4

36

ZY-cut LN

5.0

26%

340

88.4

37

Z-cut LN

5.0

20.5%

488

100.2

24

Z-cut LN

6.724

21.80%

330.8

72.1

This work

Z-cut LN

6.24

26.64%

389

103.6

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