Table 2 Design parameters of the fabricated A1-mode LWRS

From: 6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes

Resonator

TLN (nm)

TIDT (nm)

P (μm)

Ap (μm)

W (μm)

N (pair)

N_C

R (μm)

Traditional 1

300

300

20

55

4

10

0

0

Checker-shaped 1

300

300

20

55

/

10

6

2

Traditional 2

300

300

10

55

2

10

0

0

Checker-shaped 2

300

300

10

55

/

10

6

2

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