Table 3 Design parameters of the series and shunt resonators of LWR filters

From: 6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes

Resonator

TLN (nm)

TIDT (nm)

P (μm)

Ap (μm)

W (μm)

N (pairs)

C0 (fF)

Series

315

300

10

90

5

35

490

Shunt

350

300

10

90

5

12

150

Back to article page