Table 1 Performance comparison for state-of-the-art geophones and accelerometer

Electromagnetic moving-coil geophone³⁸

10 ng/Hz^1/2

15~280 Hz

Closed-loop

155 dB

50 mm

Optical moving-coil geophone¹⁸

3 ng/Hz^1/2

0.1~100 Hz

Closed-loop

176 dB

40 mm

MEMS capacitive geophone³⁹

12 ng/Hz^1/2

DC~800 Hz

Closed-loop

130 dB

10 mm

MEMS capacitive accelerometer¹⁴

0.25 ng/Hz^1/2

DC~40 Hz

Closed-loop

—

25 mm

MEMS optical grating accelerometer¹⁷

2 ng/Hz^1/2

DC~15 Hz

Open-loop

95 dB

15 mm

MEMS F-P cavity accelerometer¹⁰

2.4 ng/Hz^1/2

DC~80 Hz

Open-loop

110 dB

20 mm

This work

2.5 ng/Hz^1/2

DC~500 Hz

Open-loop

124 dB

10 mm