Table 1 The dimensions of the anti-spring mechanism
From: A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity
Symbol | Meaning | Value |
|---|---|---|
G | Height-to-width ratio | 1.155 |
w | Width of the curved beam | 2 μm |
t | Depth of the curved beam | 25 μm |
l | Span of the curved beam | 500 μm |
