Fig. 2: Variable-focus microscope system driven by the constructed liquid lens module and characterization of key performances. | Microsystems & Nanoengineering

Fig. 2: Variable-focus microscope system driven by the constructed liquid lens module and characterization of key performances.

From: Precision autofocus in optical microscopy with liquid lenses controlled by deep reinforcement learning

Fig. 2

a Schematic of the microscope imaging system integrated with an inverted-truncated cone structured liquid lens module. b Scanning electron microscope image of the 5 μm thick Parylene C dielectric layer fabricated within the liquid lens. c Scanning electron microscope image of the 180 nm hydrophobic Teflon layer fabricated on top of the Parylene-C layer. d Response time curve of the liquid lens under a 40 V driving voltage. e Focal length-voltage variation curve of the microscope system integrated with the liquid lens module under different magnifications

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