Fig. 2: Modulation principle and diffraction behavior of the MEMS grating modulator with a tunable sinusoidal grating.
From: A MEMS grating modulator with a tunable sinusoidal grating for large-scale extendable apertures
Surface profiles of the unmodulated (a) and modulated (b) modulator. The reflected beam is modulated into diffraction orders because of the deformable bending of the continuous sinusoidal gratings. c Diffraction efficiencies of a sinusoidal grating and its diffraction pattern. Zeroth- and first-order diffraction efficiencies versus modulation depth. d Simulated diffraction patterns with varying modulation depth
