Fig. 3: Fabrication processes and fabricated MEMS grating modulator.
From: A MEMS grating modulator with a tunable sinusoidal grating for large-scale extendable apertures
a Fabrication processes of the MEMS grating modulator. b Photograph of a fabricated modulator bonded to a PCB. c SEM image of the continuous grating surface. d SEM image of a single grating pitch. e SEM image of the cross-section of a grating pitch. f Detailed structural hierarchy of an insulated anchor. g Cross-sectional view of the air gap between the grating surface and the substrate insulated by anchors
