Fig. 1: Design and Performance Characteristics of the Triangular Comb Drive Actuator.
From: Angled electrode comb drives for enhanced actuator in silicon photonic applications
a Comb drive design parameters and their impact on comb drive performance11,31,32,33,34,43,48,49,50,51. b Finite element analysis (FEA) results highlighting the nonlinear stiffness of the comb drive’s mechanical frame for varying configurations. Simulation shows the frame’s displacement when force is applied at the moving beam tip. c Graph depicting stiffness variation with beam tip displacement. d Geometrical configuration of the triangular (TRI) comb finger, showing key dimensions for electrostatic force calculation. e Vector decomposition of the electrostatic force. f Effect of varying finger count (\({N}_{f}\)) and pitch (\({L}_{f}\)) on fitting within a fixed actuator area, highlighting geometric adaptability for optimizing force intensity. g Detailed view of an electrostatic actuator unit cell with triangular fingers
