Fig. 4: Electric Field Distribution and Performance Metrics of Triangular Comb Drive Actuators.
From: Angled electrode comb drives for enhanced actuator in silicon photonic applications
a Electric field norm distribution across various triangular comb drive configurations (N = 1, 2, 5, 10, 15), with color gradients indicating field intensity (V/m) b FEM simulation of a MEMS comb drive, illustrating the overall device structure, including adjacent arms, fixed and spring boundaries, and chamfered edges to reduce sharp-edge effects. c–e Numerical simulation results for triangular finger comb drives. c detailing displacement vs. voltage, d force vs. voltage, and e force intensity vs. number of fingers per arm. The hollow circles represent the actual data points obtained from the simulations, while the solid lines are the fitted curves that provide a visual guide to the underlying trend of the data. These results highlight the actuator’s performance metrics, with a peak in force intensity observed near N = 6 fingers per arm, indicating an optimal balance for actuator efficiency across various voltage levels
