Fig. 5: Experimental Setup and SEM Characterization of MEMS Triangular Comb Drive Actuators.
From: Angled electrode comb drives for enhanced actuator in silicon photonic applications
a Schematic showing the MEMS actuator setup with a DC bias, 100 kΩ protective resistor, and vernier system for displacement measurement. SEM images of MEMS comb actuators with varying finger configurations. b Top-down view showing finger diversity (\({N}_{f}\) = 1–5). c 45° angled view detailing single beam springs. d 45° focused view of the suspended silicon layer. e Angled view of an actuator with 4 fingers. f Close-up of serpentine springs for electrical connectivity and vernier scale. g 45° view from below, revealing support structure. h Wider view of actuators with 1 and 2 fingers per arm. i Cross-sectional view of a suspended MEMS actuator structure and links the diagram to an SEM image, showing the suspended electrodes with precise electrical isolation. j Overall setup with high-voltage supply, protective resistor, and precision X-Y-Z stage for accurate positioning and probing. k Close-up view of packaged MEMS actuator with zoom system capturing real-time actuation
