Fig. 1: Fabrication and characterization of SOI MEMS resonators.
From: Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout
a Fabrication process of the SOI MEMS resonator for thermal response measurement. b A microscopic image of a fabricated SOI MEMS resonator with the schematic measurement setup. c Oscillation spectrum of sample A (VAC = 100 mV) with dimensions of 120 μm (l) × 30 μm (w) × 2.2 μm (t). d Oscillation spectra of sample A at various heating powers. e Oscillation spectrum of sample B (VAC = 100 mV) with dimensions of 200 μm(l) × 30 μm(w) × 2.2 μm(t). f Oscillation spectra of sample B at various heating powers
