Fig. 4: Fabrication and characterization of SOI MEMS resonator with piezoresistive readout.
From: Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout
a Fabrication process of the SOI MEMS resonator with a piezoresistive readout. b A microscopic image of a fabricated MEMS resonator and the schematic measurement setup. Rx shows the piezoresistive part, and Rx shows a reference resistor. c Measured RF output of the piezoresistive readout (V0) when the MEMS resonator is driving into resonance. d Measured oscillation spectra of the MEMS beam with the piezoresistive readout at various driving conditions. e Measured oscillation spectra of the MEMS beam with LDV
