Fig. 5: Noise characterization of piezoresistive readout.
From: Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout
a Voltage Noise density spectra of the piezoresistive readout with V’DC = 8 V for the condition Rx = ~610 Ω, Rx = ~12 kΩ, respectively. In each measurement, R0 = Rx. b Frequency noise density of the MEMS resonator with piezoresistive readout. The MEMS beam is driven with VDC = − 9 V, VAC = 1 V, V’DC = 8 V at its resonance frequency by using a phase-locked loop, with a demodulation frequency of 500 Hz (black curve) and 1000 Hz (red curve)
