Fig. 6: Optical measurement setup and THz response comparison.
From: Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout
a Schematic optical measurement setup for the THz irradiation measurement. b The normalized THz response spectra for a SOI MEMS resonator (red curve) and a GaAs MEMS resonator (black curve)
