Fig. 7
From: Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout
Comparison of the sensitivity (1/NEP) and thermal response speed (1/τ) of SOI MEMS bolometer against state-of-the-art uncooled THz bolometers based on MEMS resonators, as well as widely used uncooled thermal detectors such as pyroelectric detectors, Golay cells, and VOx bolometers
