Fig. 2: FEA results of the WS.

a Vibration velocity and (b) deformation of the WS with radial threads of L = 10 mm, wr=ws = 3 μm, Nr = 24, Ns = 15, T = 1 μm, d = 200 μm under 0.1 Pa acoustic pressure at 100 Hz. c Frequency response of the WS with various length (L) of radial threads (d) Various thicknesses (T). e Various linewidth