Fig. 1: Schematic of the hybrid grating and its working principle for absolute nanometer-scale positioning.
From: Cross-scale structures fabrication via hybrid lithography for nanolevel positioning
a The schematic of a hybrid grating designed for absolute measurement. b Correct interregional relationship: parallel. c Incorrect interregional relationship: non-parallel. d Signals generated by the hybrid grating and front mask. The signals I–IV correspond to the signals generated by structures I–IV in (a), respectively. e The principle of absolute nanolevel positioning by pulse peak marker and signal subdivision
