Fig. 5: Characterization results of the hybrid grating.
From: Cross-scale structures fabrication via hybrid lithography for nanolevel positioning
a Photography of a hybrid grating. b–i The AFM images of 2 hybrid gratings in regions I–IV. j The nanolevel absolute positioning signals obtained using a hybrid grating. k, l Microscopic photo of the encoding structure (The data in the figure was obtained using the microscope’s built-in scale tool). m Cross-sectional views of 4 samples in the 2D grating region. n Trench depth at sampling points (4 samples)
