Fig. 2: Principle and demonstration of Lorentz-force-based tuning in a microresonator. | Microsystems & Nanoengineering

Fig. 2: Principle and demonstration of Lorentz-force-based tuning in a microresonator.

From: Smart resonant micro-sensor and micro-actuator: high-performance, wide range bi-axial magnetic sensitive/ insensitive micro-device for multifunctional sensing applications

Fig. 2

a The schematic illustrating the principle of operation for the proposed microresonator. The schematic highlights electrical connections corresponding to different tuning cases, the direction of the applied magnetic field and the direction of generated Lorentz forces. b The proof-of-concept shows the effect of the bi-axial Lorentz force on the first symmetric resonance frequency on the microbeam. The direction of the generated Lorentz force facilitates the tensile or compressive axial forces on the curved microbeam and hence modulates the first symmetric in-plane resonant mode (f1)

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