Fig. 4: Thermo-electro-mechanical behavior of the curved microbeam under different tuning cases. | Microsystems & Nanoengineering

Fig. 4: Thermo-electro-mechanical behavior of the curved microbeam under different tuning cases.

From: Smart resonant micro-sensor and micro-actuator: high-performance, wide range bi-axial magnetic sensitive/ insensitive micro-device for multifunctional sensing applications

Fig. 4

a The first symmetric in-plane resonant mode (f1) at different thermally induced currents (ITh) for various tuning cases. The results clearly show the effect of thermally generated axial stress on the first symmetric in-plane resonant mode (f1) for different cases. b The results show the simulated mid-point displacement of the curved microbeam at different thermal voltages (VTh) for V1, V2, and SB tuning cases. The experimental and simulation results correspond to zero magnetic fields (Bz = 0), ambient pressure, and temperature conditions

Back to article page