Fig. 6: Thermal tuning effects on microresonator performance and magnetic sensitivity. | Microsystems & Nanoengineering

Fig. 6: Thermal tuning effects on microresonator performance and magnetic sensitivity.

From: Smart resonant micro-sensor and micro-actuator: high-performance, wide range bi-axial magnetic sensitive/ insensitive micro-device for multifunctional sensing applications

Fig. 6

a The first symmetric in-plane resonant mode (f1) shift at different thermally induced currents (ITh) for the V1 tuning case at different magnetic field (Bz) amplitudes and polarities. The inset shows the conventional method of calculating the magnetic sensitivity (as the slope of the Δf/f vs Bz plot) for different tuning cases at the given Ith. b The comparative study of magnetic field sensitivities of various tuning cases at different input power values. c The resistance and power consumption of various tuning cases at 10 mA ITh. d The simulated maximum temperature (TMax) of the microresonator, highlighting the operational temperature range at different VTh values for V1, V2, and SB tuning cases

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