Fig. 6: Measurement results of the proposed system with the DETF resonator. | Microsystems & Nanoengineering

Fig. 6: Measurement results of the proposed system with the DETF resonator.

From: A novel multi-degree-of-freedom cascaded hybrid electro-mechanical resonator system with ultra-high sensitivity

Fig. 6

a Frequency sweep of \(Re{s}_{1}\) and \(Re{s}_{3}\) in the proposed 3-DoF structure with the DETF resonator for different bias voltages. The frequency response shows the same behavior as in the QCM mass perturbation test. b Measured amplitude ratio response and the frequency shift with respect to the applied stiffness perturbation in the 3-DoF implementation. c Measured amplitude ratio response and the frequency shift with respect to the applied stiffness perturbation in the 5-DoF implementation. d Measured output noise spectral density of the two output signals versus frequency around the \({1}^{{st}}\) and \({3}^{{rd}}\) mode for the 3-DoF implementation in open loop. e Measured output noise spectral density of the two output signals for both the 3-DoF and 5-DoF implementations in closed loop. f Allan variance of the output amplitude ratio for both the 3-DoF and 5-DoF implementations

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