Table 8 Main dimension parameters of the DETF device used

From: A novel multi-degree-of-freedom cascaded hybrid electro-mechanical resonator system with ultra-high sensitivity

Parameter

Value

Tine length

428 \({\rm{\mu }}{\rm{m}}\)

Tine width

5 μm

Transduction gap width

3 μm

Transduction gap length

227 μm

Device layer thickness

50 μm

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