Fig. 2: Assembly of 3D mesostructures and microdevices through a variety of different mechanical forces.
From: Manufacturing of 3D multifunctional microelectronic devices: challenges and opportunities
a Schematic illustration of residual stress-induced rolling and its application to lithium-ion batteries1. a is adapted with permission from ref. 1. (Copyright © 2013 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim). b Folding-dominated method that relies on the use of active materials and its application in 3D deployable organic thin-film transistors (OTFTs)12. b is adapted with permission from ref. 12. (Copyright © 2014 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim). c Folding-dominated method induced by capillary forces and a representative microelectronic device with optically active split-ring resonator (SRRs) patterns7. c is adapted with permission from ref. 7. (Copyright © 2011 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim). d Mechanically guided 3D assembly by compressive forces imparted by a prestrained substrate28 and 3D photodetection systems capable of measuring incident light parameters3. d is adapted with permission from ref. 3. (Copyright © 2018 Macmillan Publishers Limited, part of Springer Nature)
