Fig. 1
From: Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
In situ morphological characterization during Pt ALD processes. a Selection of experimental 2D GISAXS images measured in situ during (left) O2-based Pt ALD and (right) N2 *-based Pt ALD. b Corresponding simulated patterns. All details about the calculations may be found in Supplementary Note 2 and Supplementary Figs. 7 and 8. The dashed vertical lines indicate the q y position of the main scattering lobe. The horizontal/vertical arrows indicate the minima along the q z/q y direction
