Fig. 5

Capacitance and dielectric constant determination. a Spatial map of the capacitance, derived from the inference method. Subtraction of the measuring system capacitance (taken as the value of C on the bare film) from the capacitance measured on each capacitor allows calculation of the dielectric constant, plotted in b, with a histogram of these results plotted in c. The histogram peaks at ~100, which is reasonable for this composition of PZT thin film