Fig. 1

LPCVD growth of large-area uniform, monolayer MoS₂ on soda-lime glass. a Schematic diagram of a face-to-face metal-precursor supply route. b Photograph of a 6-inch continuous MoS₂ film on soda-lime glass synthesized for ~8 min. c Typical OM image of the MoS₂ film, scale bar: 0.2 mm. d Raman (left panel) and PL (right panel) spectra of the as-grown MoS₂, confirming its monolayer feature. e Raman mapping on the intensity of A_1g peak for the continuous MoS₂ film, scale bar: 10 µm. f OM image of triangular MoS₂ domains on glass grown for ~5 min with the other parameters kept identical. Scale bar: 0.1 mm. g AFM image of the edge of a MoS₂ crystal (transferred onto SiO₂/Si) and its corresponding height profile. Scale bar: 1 µm. h Comparison of the uniform area (bars) and growth time (green squares) of monolayer MoS₂ on glass and other monolayer TMDs on various substrates reported in the literatures^{14,26,29,38,39,40,41,42,43,44}