Fig. 1
Experimental setup for measuring near-field thermal radiation between MD multilayers. a Schematic of an integrated platform consisting of the MEMS-based microdevices and the three-axis nanopositioner. b Three-dimensional schematic of the experimental setup. The position of the emitter part is controlled by the displacement of the picomotor actuators. The receiver part is fixed on the heat sink. c Photo of emitter part taken by digital single-lens reflex (DSLR) camera. The width and length of the MD emitter are 720 μm and 14.3 mm, respectively. The area excluding the MD emitter is coated with Au film to suppress far-field radiation. d DSLR image of the receiver part. The width of the MD receiver is 540 μm. The length of one segment of the MD receiver is 3.44 mm. e Three-dimensional schematic of emitter part of MEMS-fabricated microdevice. MD-emitter-capacitor electrode, Au film for suppressing far-field radiation, and MD-emitter-capacitor-soldering pads are described. f As in e, except for the receiver part. MD-receiver-capacitor electrodes (d1–4 capacitor electrodes), MD-receiver-capacitor-soldering pads (d1-4 capacitor-soldering pads), and calibration-heater-soldering pads are depicted
