Fig. 5 | Nature Communications

Fig. 5

From: Precision ultrasound sensing on a chip

Fig. 5

Ultrasonic force sensitivity in comparison with other air-coupled sensors. Ultrasonic force sensitivity is evaluated as the noise equivalent pressure sensitivity multiplied by the sensing area and plotted versus frequency: open circles correspond to this work and solid symbols show results of other optical (blue circles) and electrical (red squares) approaches. The improvement of the sensitivity in this work is especially notable between 80 kHz and 1 MHz. Citations to previous work are provided in the Supplementary Fig. 8

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