Fig. 3
From: Universal perpendicular orientation of block copolymer microdomains using a filtered plasma
Orientation control of SDC16 and SML100 films with bottom, top and sandwich plasma-treated layers. Top-view and cross-section SEM images of a–c SDC16 and d–f SML100 with bottom plasma (BP, a and d), top plasma (TP, b and e) and sandwiched plasma (SWP, c and f). Inset schematics represent the microdomain orientations of BCP films with BP, TP, and SWP conditions. For BCP films with BP or TP, perpendicularly oriented BCP domains (yellow region) are observed at the interfaces in contact with the plasma treated layer, but parallel oriented BCP domains (red region) are observed at the untreated interface. In comparison, the BCP films with SWP condition have fully perpendicular orientation of microdomains throughout the film. Insets represent GISAXS patterns of the BCP films with incidence angles of 0.08° (left, below the critical angle αc) and 0.14° (right, above αc). The yellow and white arrows indicate the characteristic scattering peaks of the perpendicular or parallel orientations, respectively
