Fig. 3

Experimental verification of optical modulation in MQW resonators. a SEM image of MQW-based hybrid Mie-GM resonators with double slits. b Measured reflectance spectra of the resonator array for different applied bias voltages. The incoming light is polarized perpendicularly to the MQW stripes. c Measured relative reflectance of the hybrid Mie-GM resonant metasurface as a function of wavelength and applied voltage. We consider the wavelength range from 915 nm to 925 nm with a step of 1 nm. d Measured phase modulation at two different wavelengths. Red: 917 nm, blue: 924 nm. Each data point corresponds to an average phase shift measured at four different positions on the sample, while each error bar indicates the standard deviation of the obtained four data points