Fig. 2
From: Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics
Validation of the MOF-CVD process and characterization of the deposited MOF thin films. a Schematic representation of the conversion of ALD ZnO and native CoOx to ZIF-8 and ZIF-67 and the corresponding increase in thickness as measured by spectroscopic ellipsometry (SE) and from SEM cross-sectional images. b Baseline-corrected GI-XRD diffraction patterns together with simulated powder diffractogram for ZIF-8. c Ellipsometric porosimetry with methanol and water as adsorbates. The amount of adsorbate corresponds to the change of the ellipsometric angle Delta (@633 nm) relative to the value recorded before introducing probe molecules. The values are normalized against the Delta change measured at methanol saturation pressure. d AFM topography images of MOF-CVD films: ZIF-8 (purple frame) and ZIF-67 (light blue frame)
