Fig. 3

Dielectric constant and Young’s modulus of MOF-CVD ZIF-8 and ZIF-67 films. a experimental setup for k-value measurements. b k-value and dissipation factor spectra (10 kHz–1 MHz) measured on MIM capacitors with three different top electrode areas. c Positioning of MOFs on the Young’s modulus/k-value map in comparison with other classes of advanced low-k dielectrics. The Young’s modulus and k-value data measured on MOF-CVD ZIF-8 and ZIF-67 films (this work) are marked with stars. The theoretical and experimental values for the Young’s modulus and k-value in the graph are taken from^{31,56,63,72,74,86,87,88,89,90,91,92,93,94,95,96,97,98,99,100}