Fig. 4

Comparison of optoelectronic performances. a Photoresponsivity and b photoresponse time according to the number and direction of heterojunctions in the MoS₂ channel. c Photoresponsivity and d photoresponse time of Type (3) and (6) according to the number of selective ALE cycles patterned on 6L-MoS₂. e Photoresponsivity and f photoresponse time of Type (3) and (6) as a function of the incident laser power. g Photoresponsivity and h photoresponse time of Type (3) and (6) as a function of the laser wavelength. i Schematic drawing on carrier transport mechanism of Type (6) photodetector. Quantitative comparison of j photoresponsivity and k photoresponse time with previously reported MoS₂-based photodetectors