Fig. 2: VOFET microfabrication steps and a fully fabricated microchip.
From: Edge-driven nanomembrane-based vertical organic transistors showing a multi-sensing capability
a The optical microscopy images taken at the end of every step of the microfabrication process of VOFET devices, together with the photolithography masks designed using the computer-aided program (CleWin). The last panel shows the top-view of the active region of an as-fabricated VOFET. The scale bars in the fifth and eighth panel correspond to 100 µm, whereas, in the rest of the panels the scale bar corresponds to 200 µm. b Photograph of a fully fabricated microchip consisting of 40 rolled-up NM-based VOFETs.
