Fig. 2: Imaging of MoS2 monolayers with various local configurations.

AFM images of a 3CoMo−Vs, b 3FeMo−Vs, c 1VMo, and d 1CrMo samples, illustrating the monolayer nature of the as-synthesized MoS2. e–h Atomic resolution STEM images of the TM-containing MoS2 samples with i–l corresponding electron energy loss spectrum on single TM. The images confirm that, while Co and Fe atoms prefer to form triangular clusters where three TM atoms connect a central sulfur vacancy (3TMMo−Vs, highlighted by green circles), V and Cr only form substitutional single atom without sulfur vacancy (1TMMo, highlighted by white dashed circles), in good consistence with the theoretical prediction.