Fig. 5: Fabrication design and performance of the sensor array.
a Relationship between the minimum detection area and the urchin-like hollow carbon sphere (UHCS) concentration. b Sketch of the crosstalk verification test. c Photographs of a 5-μm-wide electrode used to form a 25 μm2 area pressure sensor. The scale bars are 2 mm, 100 μm and 10 μm. d Schematic diagram of the 25 μm2 sensor with crossed electrodes. e Three types (sine, rectangular, and triangular) of cyclic pressure applied in a real-time sensing test of the 25 μm2 pressure sensor shown in d. The black curve shows the loading force change with time, and the red curve shows the resistance change. f Photographs of two 5-μm-wide electrodes used for the crosstalk verification test. The scale bars are 2 mm, 100 μm, and 10 μm. g Three types (sine, rectangular, and triangular) of cyclic pressure applied in a real-time sensing test of the verification test sensor shown in f. h Detection by a 64 × 64 pixel pressure sensor of two tiny balls of 0.02 and 0.1 g. Scale bars, 6.5 mm in the sensor photograph and 300 μm in the magnified optical micrograp.
