Table 1 Performance metric during 1 mm3 production for 20 MP and 50 MP cameras.
Imaging parameters | Avg. production 20 Mpixel | Avg. production 50 Mpixel | 50 Mpixel peak | Unit |
|---|---|---|---|---|
Frame size (pix) | 3840 | 5408 | 5504 | Aspect ratio of 1:1 |
Resolution | 3.95–4 | 3.95–4 | 4 | nm/pixel |
Tile overlap | 13 | 9 | 9 | % |
Net imaging rate | 3.2–3.5 | 3.2–3.5 | 4.0 | Hz |
FOV per side | 15 | 21 | 22 | µm |
AOV | 225 | 468 | 484 | µm2 |
Pixels per image | 14.7 | 29.2 | 30.3 | Mpixel |
Time per section | 30–40 | 15–25 | ~14 | Minute |
Tiles w/overlap | 5100 | 2916 | 2600 | Per section |
Sections per week (24/7) | ~300 | ~490 | ~700 | Section per week |
Time to image volume with one scope @65% uptime | 900 | 525 | 450 | Day |
Time to image volume with five scopes @65% uptime | 180 | 105 | 90 | Day |
Completion of project in months @65% w/5 scopes | ~6 | ~3.5 | ~3 | Month |
