Table 1 Chemical compositions, mechanical and structural properties, and surface roughness parameters of the DLC coatings as used in this study.
Label | Composition (at%) | Young’s modulus E (GPa) | Hardness H (GPa) | Density ρ (g cm−3) | sp3 C \({p}_{{{sp}}^{3}}\) (%) | |
---|---|---|---|---|---|---|
C | H | |||||
a-C:H | 80 | 20 | 259 | 27 | 2.07 | - |
a-C | >99 | <1 | 287 | 24 | 2.34 | 31 |
ta-C(51) | >99 | <1 | 493 | 51 | 2.77 | 62 |
ta-C(66) | >99 | <1 | 572 | 66 | 2.91 | 73 |
ta-C(78) | >99 | <1 | 625 | 78 | 3.01 | 79 |
Label | RMS after running-in | |||||
---|---|---|---|---|---|---|
height \({h}_{{{{\rm{rms}}}}}\) (nm) | slope \({h}_{{{{\rm{rms}}}}}^{{\prime} }\) (-) | |||||
Cylinder | Disc | Composite | Cylinder | Disc | Composite | |
a-C:H | 5.0 ± 0.7 | 6.7 ± 1.3 | 8.4 ± 1.0 | 0.051 ± 0.015 | 0.087 ± 0.043 | 0.104 ± 0.032 |
a-C | 13.4 ± 3.9 | 26.5 ± 0.1 | 29.8 ± 1.4 | 0.072 ± 0.002 | 0.131 ± 0.005 | 0.150 ± 0.004 |
ta-C(51) | 3.9 ± 1.3 | 9.0 ± 2.0 | 9.8 ± 1.5 | 0.025 ± 0.002 | 0.054 ± 0.028 | 0.060 ± 0.020 |
ta-C(66) | 3.8 ± 0.6 | 9.1 ± 0.4 | 9.9 ± 0.4 | 0.044 ± 0.010 | 0.078 ± 0.009 | 0.089 ± 0.008 |
ta-C(78) | 10.9 ± 0.8 | 10.4 ± 4.3 | 15.3 ± 2.5 | 0.099 ± 0.013 | 0.080 ± 0.015 | 0.128 ± 0.012 |