Fig. 5: Illustration of theoretical understanding of the Co ALD process.

a Theoretical reaction coordinate for Co(Cp)2 deposition on pristine NCNS and Pt1/NCNS. The Gibbs free energies were calculated at T = 523 K and P = 1 atm. b Illustration of Co ALD process on Pt1/NCNS. The white, brown, blue, orange, and silver spheres represent H, C, N, Co, and Pt, respectively.