Fig. 3: Measurements of nanometric SiN and SiC Simens stars deposited on a silicon wafer.
From: Visualizing nanometric structures with sub-millimeter waves
a Recorded Terahertz image. b Terahertz image of the 240 nm thick SiN Siemens star after subtracting the warping of the silicon wafer (shown in e) and image enhancement. c Actual optical height profile of the line indicated by the blue arrow in (b). d Optical micrograph of the center of the 240 nm thick SiN Siemens star on the silicon wafer. e Warping of the silicon wafer. f Terahertz image of the 49 nm thick SiC Siemens star on a silicon wafer. g Actual optical height profile of the line indicated by the blue arrow in (f), after subtraction of warped background. h Optical micrograph of the 49 nm thick SiC Siemens star. The color scales of the terahertz images represent the optical thicknesses.
