Fig. 2: Atomic force microscopy measurements of a surface pattern defining layer.
From: Wafer-scale epitaxial modulation of quantum dot density
a AFM maps of GaAs surfaces after a coverage of 0, 0.25, 0.5 and 0.75 ML relative to the location of the lowest step density. b Step density (circles) determined from AFM measurements along the thickness gradient of the PDL (white dashed line in the inset wafer illustration) and sinusoidal fit (red line). The black circles correspond to the four images in (a). The calculated step density originating from the wafer miscut in the horizontal [011] direction is marked by the dashed black line and is determined from average terrace widths.
