Fig. 4: Demonstration of epitaxial pattern control.
From: Wafer-scale epitaxial modulation of quantum dot density
QD PL intensity maps of a 30 nm GaAs PDL, b superposition of 80 and 40 nm GaAs PDL, and c 150 nm AlGaAs PDL. High-resolution maps of the marked areas are shown below. The normalized PL intensity along the black dotted line of the respective zoom-ins is presented in the bottom row.
