Fig. 1: Concept of binary-state probe microscopy (BSPM).
From: Binary-state scanning probe microscopy for parallel imaging

a Working principle of BSPM measurement. The system reconstructs parallelized height information from parallelized contact signals of the tip array and a shared scanning distance signal of the z-scanner using the xy-scanner. b Schematic of BSPM measurement system. Signal flows of the xyz-scanning distances and the parallelized contact signals for topography reconstruction. c Conceptual illustration depicting the hierarchical measurement architecture of BSPM with cantilever-free scanning probe array.